Compliant MEMS Motion Characterization by Nanoindentation
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 2007
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-1052-dd06-24